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Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
Publication:
Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
Date
2009
Meeting abstract
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19293.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hourdakis, E.
;
Theodoropoulou, M.
;
Nassiopoulou, A.G.
;
Parisini, A.
;
Reading, M.A.
;
van den Berg, J.A.
;
Conard, Thierry
;
De Gendt, Stefan
Journal
Abstract
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1860
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Citations
Metrics
Views
1860
since deposited on 2021-10-17
418
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations