Publication:
FIM observation of dopants in silicon
Date
| dc.contributor.author | Gilbert, Matthieu | |
| dc.contributor.author | Koelling, Sebastian | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-17T22:22:52Z | |
| dc.date.available | 2021-10-17T22:22:52Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15350 | |
| dc.source.conference | Atom Probe Workshop | |
| dc.source.conferencedate | 13/09/2009 | |
| dc.source.conferencelocation | Oxford UK | |
| dc.title | FIM observation of dopants in silicon | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |