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FIM observation of dopants in silicon

Date

 
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-17T22:22:52Z
dc.date.available2021-10-17T22:22:52Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15350
dc.source.conferenceAtom Probe Workshop
dc.source.conferencedate13/09/2009
dc.source.conferencelocationOxford UK
dc.title

FIM observation of dopants in silicon

dc.typeMeeting abstract
dspace.entity.typePublication
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