Publication:

Metal contamination on silicon surfaces from solvents

Date

2005
Proceedings Paper
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dc.contributor.authorBearda, Twan
dc.contributor.authorVandermot, Ief
dc.contributor.authorVan den Broeck, Kristel
dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorMertens, Paul
dc.date.accessioned2021-10-16T00:44:40Z
dc.date.available2021-10-16T00:44:40Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10072
dc.source.beginpage269
dc.source.conferenceUltra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium
dc.source.conferencedate20/09/2004
dc.source.conferencelocationBrussel Belgium
dc.source.endpage272
dc.title

Metal contamination on silicon surfaces from solvents

dc.typeProceedings paper
dspace.entity.typePublication
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