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Patterning challenges for beyond 3nm logic devices: Example of an interconnected magnetic tunnel junction
Publication:
Patterning challenges for beyond 3nm logic devices: Example of an interconnected magnetic tunnel junction
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Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Thiam, Arame
;
Wan, Danny
;
Souriau, Laurent
;
Babaei Gavan, Khashayar
;
Rassoul, Nouredine
;
Swerts, Johan
;
Couet, Sebastien
;
Raymenants, Eline
;
Jussot, Julien
;
Trivkovic, Darko
;
Ercken, Monique
;
Wilson, Chris
;
Radu, Iuliana
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2006
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Acq. date: 2025-12-15
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Metrics
Views
2006
since deposited on 2021-10-27
3
last month
Acq. date: 2025-12-15
Citations