Independent double-gate FinFets with asymmetric gate stacks

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Author(s)

Masahara, Meishoku

;

;

Witters, Liesbeth

;

Doornbos, Gerben

;

Nguyen Hoang, Viet

;

Van den Bosch, Geert

;

Vrancken, Christa

;

Devriendt, Katia

;

Neuilly, Francois

;

;

;

;

Biesemans, Serge

Journal

Microelectronic Engineering

Metrics

1891 since deposited on 2021-10-16

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Acq. date: 2025-12-08