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Closed-loop modeling of silicon nanophotonics: from design to fabrication and back again

Date

2008-06
Proceedings Paper
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dc.contributor.authorBogaerts, Wim
dc.contributor.authorVanholme, Lieven
dc.contributor.authorBradt, P.
dc.contributor.authorBienstman, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorBienstman, Peter
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.date.accessioned2021-10-17T06:19:37Z
dc.date.available2021-10-17T06:19:37Z
dc.date.embargo9999-12-31
dc.date.issued2008-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13408
dc.source.beginpage11
dc.source.conferenceXVIIth International Workshop on Optical Waveguide Theory and Numerical Modelling - OWTNM
dc.source.conferencedate13/06/2008
dc.source.conferencelocationEindhoven the Netherlands
dc.title

Closed-loop modeling of silicon nanophotonics: from design to fabrication and back again

dc.typeProceedings paper
dspace.entity.typePublication
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