Publication:
Silicidation and metallization issues using rapid thermal processing
Date
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-09-29T14:44:44Z | |
| dc.date.available | 2021-09-29T14:44:44Z | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1338 | |
| dc.source.beginpage | 333 | |
| dc.source.conference | Advances in Rapid Thermal and Integrated Processing; NATO advanced study institute on Advances in Rapid Thermal and Integrated P | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 374 | |
| dc.title | Silicidation and metallization issues using rapid thermal processing | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |