Publication:
Depth profiling with oxygen beams
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Alay, Josep Lluis | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | De Coster, Walter | |
| dc.contributor.author | Elst, Kathy | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T12:50:49Z | |
| dc.date.available | 2021-09-29T12:50:49Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/416 | |
| dc.source.beginpage | 599 | |
| dc.source.conference | Secondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference | |
| dc.source.conferencedate | 7/11/1993 | |
| dc.source.conferencelocation | Yokohama Japan | |
| dc.source.endpage | 608 | |
| dc.title | Depth profiling with oxygen beams | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |