Publication:
Orientation dependent stress build-up during the formation of epitaxial CoSi2
Date
| dc.contributor.author | Steegen, An | |
| dc.contributor.author | Detavernier, C. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Van Meirhaeghe, R. L. | |
| dc.contributor.author | Cardon, F. | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T13:50:21Z | |
| dc.date.available | 2021-10-14T13:50:21Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4768 | |
| dc.source.conference | Materials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy. | |
| dc.source.conferencelocation | ||
| dc.title | Orientation dependent stress build-up during the formation of epitaxial CoSi2 | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |