Publication:
Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructures
Date
| dc.contributor.author | Morschbacher, M.J. | |
| dc.contributor.author | da Silva, D.L. | |
| dc.contributor.author | Fichtner, P.F.P. | |
| dc.contributor.author | Oliviero, E. | |
| dc.contributor.author | Behar, M. | |
| dc.contributor.author | Zawislak, F.C. | |
| dc.contributor.author | Hollander, B. | |
| dc.contributor.author | Luysberg, M. | |
| dc.contributor.author | Mantl, S. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-15T14:59:01Z | |
| dc.date.available | 2021-10-15T14:59:01Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9323 | |
| dc.source.beginpage | 703 | |
| dc.source.endpage | 707 | |
| dc.source.journal | Nuclear Instruments & Methods in Physics Research B | |
| dc.source.volume | 219-220 | |
| dc.title | Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructures | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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