Publication:

Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigation

Date

2009
Journal article
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dc.contributor.authorGhisi, Aldo
dc.contributor.authorKalicinski, Stanislaw
dc.contributor.authorMariani, Stefano
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorCorigliano, Alberto
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-17T22:21:43Z
dc.date.available2021-10-17T22:21:43Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15345
dc.source.beginpage35023
dc.source.issue3
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume19
dc.title

Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigation

dc.typeJournal article
dspace.entity.typePublication
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