Publication:
Etch challenges of a spin-on trilayer resist system for narrow pitch dual damascene patterning
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1876 since deposited on 2021-10-20
5last month
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Acq. date: 2026-08-09
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Statistics
Views
1876 since deposited on 2021-10-20
5last month
2last week
Acq. date: 2026-08-09
Citations