Publication:

Etch challenges for chemo-expitaxy Directed Self-Assembly (DSA) LiNe flow in Fin patterning

Date

2016
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorChan, BT
dc.contributor.authorSayan, Safak
dc.contributor.authorMarzook, Taisir
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorGronheid, Roel
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorPiumi, Daniele
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorPiumi, Daniele
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-23T10:14:14Z
dc.date.available2021-10-23T10:14:14Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26416
dc.source.conferencePlasma Etch and Strip in Microtechnology - PESM
dc.source.conferencedate9/05/2016
dc.source.conferencelocationGrenoble France
dc.title

Etch challenges for chemo-expitaxy Directed Self-Assembly (DSA) LiNe flow in Fin patterning

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
34592.pdf
Size:
193.12 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions