Publication:

On the optical constants of cobalt in the M-absorption edge region

Date

2023
Journal article
https://doi.org/10.1016/j.ijleo.2022.170455
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dc.contributor.authorSaadeh, Qais
dc.contributor.authorNaujok, Philipp
dc.contributor.authorThakare, Devesh
dc.contributor.authorWu, Meiyi
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorScholze, Frank
dc.contributor.authorBuchholz, Christian
dc.contributor.authorSalami, Zanyar
dc.contributor.authorAbdulhadi, Yasser
dc.contributor.authorGarcia, Danilo Ocana
dc.contributor.authorMentzel, Heiko
dc.contributor.authorBabuschkin, Anja
dc.contributor.authorLaubis, Christian
dc.contributor.authorSoltwisch, Victor
dc.contributor.imecauthorThakare, Devesh
dc.contributor.imecauthorWu, Meiyi
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.orcidimecThakare, Devesh::0000-0003-3265-7042
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.date.accessioned2023-06-29T14:00:05Z
dc.date.available2023-02-26T03:28:00Z
dc.date.available2023-06-29T14:00:05Z
dc.date.embargo2023-02-28
dc.date.issued2023
dc.description.wosFundingTextThis project has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 783247 - Technology Advances for Pilot line of Enhanced Semiconductors for 3 nm (TAPES3) and from the European Metrology Programme for Innovation and Research (EMPIR) programme under grant No 20IND04-Traceable Metrology of Soft X-ray to IR Optical Constants and Nanofilms for Advanced Manufacturing (ATMOC) . These Joint Undertakings receive support from the European Union?s Horizon 2020 research and innovation program and from Netherlands, France, Belgium, Germany, Czech Republic, Austria, Hungary, Israel, Switzerland, Turkey, Denmark and Finland. Also, the authors would like to thank Olivier Richard from Materials and Component Analysis (MCA) department at imec for TEM and EDS reports.
dc.identifier.doi10.1016/j.ijleo.2022.170455
dc.identifier.issn0030-4026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41149
dc.publisherELSEVIER GMBH
dc.source.beginpageArt.: 170455
dc.source.endpagena
dc.source.issueFebruary
dc.source.journalOPTIK
dc.source.numberofpages14
dc.source.volume273
dc.subject.keywordsX-RAY REFLECTIVITY
dc.subject.keywordsEXTREME-ULTRAVIOLET
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsWAVELET-TRANSFORM
dc.subject.keywordsFREQUENCY-ANALYSIS
dc.subject.keywordsREFLECTOMETRY
dc.subject.keywordsOPTIMIZATION
dc.subject.keywordsINFORMATION
dc.subject.keywordsSCATTERING
dc.subject.keywordsMIRRORS
dc.title

On the optical constants of cobalt in the M-absorption edge region

dc.typeJournal article
dspace.entity.typePublication
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