Publication:
Stacking and interconnection of ICs in the 3rd dimension
Date
| dc.contributor.author | Swinnen, Bart | |
| dc.contributor.imecauthor | Swinnen, Bart | |
| dc.date.accessioned | 2021-10-17T11:05:42Z | |
| dc.date.available | 2021-10-17T11:05:42Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14527 | |
| dc.source.conference | 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS | |
| dc.source.conferencedate | 21/09/2008 | |
| dc.source.conferencelocation | Brugge Belgium | |
| dc.title | Stacking and interconnection of ICs in the 3rd dimension | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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