Publication:
Metrology for evaluating elastic and fracture properties of porous low dielectric constant materials
Date
| dc.contributor.author | Okudur, Oguzhan Orkut | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Zahedmanesh, Houman | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Okudur, Oguzhan Orkut | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | Zahedmanesh, Houman | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Okudur, Oguzhan Orkut::0000-0002-4790-7772 | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-22T21:26:20Z | |
| dc.date.available | 2021-10-22T21:26:20Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25700 | |
| dc.source.beginpage | na | |
| dc.source.conference | Nanobrucken: a Nanomechanical Testing Workshop & Hysitron User Meeting | |
| dc.source.conferencedate | 21/04/2015 | |
| dc.source.conferencelocation | Potsdam Germany | |
| dc.title | Metrology for evaluating elastic and fracture properties of porous low dielectric constant materials | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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