Publication:

Epitaxial growth in advanced MOS devices: challenges and solutions

Date

2012-05
Meeting abstract
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Author(s)

Loo, Roger  
;
Hikavyy, Andriy  
;
Vincent, Benjamin  
;
Gencarelli, Federica
;
Witters, Liesbeth  
;
Mitard, Jerome  
;
Hellings, Geert  
;
Sioncke, Sonja
;
Caymax, Matty  
;
Bender, Hugo  
;
Simoen, Eddy  
;
Eneman, Geert  
;
Vandervorst, Wilfried  
;
Thean, Aaron  

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1806 since deposited on 2021-10-20
Acq. date: 2025-12-15

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1806 since deposited on 2021-10-20
Acq. date: 2025-12-15

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