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Optimization of the optical phase shift in attenuated PSM and application to quarter micron deep-UV lithography for logics
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1981 since deposited on 2021-09-29
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Acq. date: 2026-08-08
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1981 since deposited on 2021-09-29
1last month
1last week
Acq. date: 2026-08-08
Citations