Publication:
Mechanisme for the formation of metal oxide particles in ALD during the chemisorption of metal chlorides
Date
| dc.contributor.author | Puurunen, Riikka | |
| dc.date.accessioned | 2021-10-15T15:39:10Z | |
| dc.date.available | 2021-10-15T15:39:10Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9473 | |
| dc.source.conference | Atomic Layer Deposition Conference | |
| dc.source.conferencedate | 16/08/2004 | |
| dc.source.conferencelocation | Helsinki Finland | |
| dc.title | Mechanisme for the formation of metal oxide particles in ALD during the chemisorption of metal chlorides | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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