Publication:
Imec CMORE SiGeMEMS technology platform
Date
| dc.contributor.author | Donnay, Stephane | |
| dc.contributor.imecauthor | Donnay, Stephane | |
| dc.contributor.orcidimec | Donnay, Stephane::0000-0003-2489-4793 | |
| dc.date.accessioned | 2021-10-19T13:18:28Z | |
| dc.date.available | 2021-10-19T13:18:28Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18852 | |
| dc.identifier.url | http://www.mu-sic.tohoku.ac.jp/saisentan/archive/ISIM2011/index.html | |
| dc.source.conference | International Symposium on Integrated Microsystems - ISIM | |
| dc.source.conferencedate | 10/02/2011 | |
| dc.source.conferencelocation | Tsukuba Japan | |
| dc.title | Imec CMORE SiGeMEMS technology platform | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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