Ultracompact phase modulator based on a cascade of NEMS-operatered slot waveguides fabricated in silicon-on-insulator

dc.contributor.author	Van Acoleyen, Karel
dc.contributor.author	Roels, Joris
dc.contributor.author	Mechet, Pauline
dc.contributor.author	Claes, Tom
dc.contributor.author	Van Thourhout, Dries
dc.contributor.author	Baets, Roel
dc.contributor.imecauthor	Van Thourhout, Dries
dc.contributor.imecauthor	Baets, Roel
dc.contributor.orcidimec	Van Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimec	Baets, Roel::0000-0003-1266-1319
dc.date.accessioned	2021-10-20T17:26:39Z
dc.date.available	2021-10-20T17:26:39Z
dc.date.embargo	9999-12-31
dc.date.issued	2012-06
dc.identifier.issn	1943-0655
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21670
dc.source.beginpage	779
dc.source.endpage	788
dc.source.issue	3
dc.source.journal	IEEE Photonics Journal
dc.source.volume	4
dc.title	Ultracompact phase modulator based on a cascade of NEMS-operatered slot waveguides fabricated in silicon-on-insulator
dc.type	Journal article
dspace.entity.type	Publication
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