Publication:

Crystalline properties and strain relaxation mechanism of CVD grown GeSn

Date

2012
Proceedings Paper
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dc.contributor.authorGencarelli, Federica
dc.contributor.authorVincent, Benjamin
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorVantomme, Andre
dc.contributor.authorMoussa, Alain
dc.contributor.authorFranquet, Alexis
dc.contributor.authorKumar, Arul
dc.contributor.authorBender, Hugo
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-20T11:09:44Z
dc.date.available2021-10-20T11:09:44Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20713
dc.source.beginpage875
dc.source.conferenceSiGe, Ge, and Related Compunds 5: Materials, Processing, and Devices
dc.source.conferencedate7/10/2012
dc.source.conferencelocationHonolulu, HI USA
dc.source.endpage883
dc.title

Crystalline properties and strain relaxation mechanism of CVD grown GeSn

dc.typeProceedings paper
dspace.entity.typePublication
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