Publication:
Multi-plate misalignment artifacts in rotating-compensator ellipsometry: analysis and data treatment
Date
| dc.contributor.author | Marsik, Premysl | |
| dc.contributor.author | Humlicek, Josef | |
| dc.date.accessioned | 2021-10-17T08:49:30Z | |
| dc.date.available | 2021-10-17T08:49:30Z | |
| dc.date.issued | 2008 | |
| dc.identifier.issn | 1610-1634 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14125 | |
| dc.source.beginpage | 1064 | |
| dc.source.endpage | 1067 | |
| dc.source.issue | 5 | |
| dc.source.journal | Physica Status Solidi C | |
| dc.source.volume | 5 | |
| dc.title | Multi-plate misalignment artifacts in rotating-compensator ellipsometry: analysis and data treatment | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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