Publication:

Towards Sub-10 nm carrier profiling with spreading resistance techniques

Date

2001
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorClarysse, Trudo
dc.contributor.authorEyben, Pierre
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-14T16:42:22Z
dc.date.available2021-10-14T16:42:22Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5150
dc.source.beginpage61
dc.source.endpage66
dc.source.issue1_3
dc.source.journalMaterials Science in Semiconductor Processing
dc.source.volume4
dc.title

Towards Sub-10 nm carrier profiling with spreading resistance techniques

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles