Publication:
Light-induced capacitance alteration for non-destructive fault isolation in TSV structures for 3-D integration
Date
| dc.contributor.author | Jacobs, Kristof J.P. | |
| dc.contributor.author | Khaled, Ahmad | |
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Wang, Teng | |
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Jacobs, Kristof J.P. | |
| dc.contributor.imecauthor | Khaled, Ahmad | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Jacobs, Kristof J.P.::0000-0002-1081-3633 | |
| dc.contributor.orcidimec | Khaled, Ahmad::0000-0003-2892-3176 | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-23T11:29:50Z | |
| dc.date.available | 2021-10-23T11:29:50Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26772 | |
| dc.source.conference | International Symposium for Testing and Failure Analysis - ISTFA | |
| dc.source.conferencedate | 6/11/2016 | |
| dc.source.conferencelocation | Forth Worth,TX USA | |
| dc.title | Light-induced capacitance alteration for non-destructive fault isolation in TSV structures for 3-D integration | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |