Quantitation of major elements with secondary ion mass spectrometry by using M-2(+)-molecular ions

dc.contributor.author	Vlekken, J.
dc.contributor.author	Wu, Ting-Di
dc.contributor.author	D'Olieslaeger, Marc
dc.contributor.author	Knuyt, G.
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	De Schepper, Luc
dc.contributor.imecauthor	D'Olieslaeger, Marc
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.date.accessioned	2021-10-01T09:41:23Z
dc.date.available	2021-10-01T09:41:23Z
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3132
dc.source.beginpage	638
dc.source.endpage	642
dc.source.issue	6
dc.source.journal	Journal of the American Society for Mass Spectrometry
dc.source.volume	9
dc.title	Quantitation of major elements with secondary ion mass spectrometry by using M-2(+)-molecular ions
dc.type	Journal article
dspace.entity.type	Publication
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