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Contact inspection and resistance - capacitance measurement of Si nanowire with SEM voltage contrast
Publication:
Contact inspection and resistance - capacitance measurement of Si nanowire with SEM voltage contrast
Date
2019
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ohashi, Takeyoshi
;
Hasumi, Kazuhisa
;
Ikota, Masami
;
Lorusso, Gian
;
Mertens, Hans
;
Horiguchi, Naoto
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
Abstract
Description
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1996
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations
Metrics
Views
1996
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations