Publication:

Mechanically conscious design of airgaps in nano-interconnects

Date

2016
Meeting abstract
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dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorGonzalez, Mario
dc.contributor.authorCiofi, Ivan
dc.contributor.authorCroes, Kristof
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2021-10-23T17:42:59Z
dc.date.available2021-10-23T17:42:59Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27648
dc.source.beginpage65
dc.source.conferenceMaterials for Advanced Metalization - MAM
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
dc.source.endpage66
dc.title

Mechanically conscious design of airgaps in nano-interconnects

dc.typeMeeting abstract
dspace.entity.typePublication
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