Publication:

Reliability of MOL local interconnects

Date

2013
Proceedings Paper
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dc.contributor.authorKauerauf, Thomas
dc.contributor.authorBranka, Anna
dc.contributor.authorSorrentino, Beppo
dc.contributor.authorRoussel, Philippe
dc.contributor.authorDemuynck, Steven
dc.contributor.authorCroes, Kristof
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.date.accessioned2021-10-21T08:41:36Z
dc.date.available2021-10-21T08:41:36Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22571
dc.source.beginpage2F.5
dc.source.conferenceIEEE International Reliability Physics Conference - IRPS
dc.source.conferencedate14/04/2013
dc.source.conferencelocationMonterey, CA USA
dc.title

Reliability of MOL local interconnects

dc.typeProceedings paper
dspace.entity.typePublication
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