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Vacuum UV spectroscopic ellipsometry applied to the characterization of high-k gate dielectrics
Publication:
Vacuum UV spectroscopic ellipsometry applied to the characterization of high-k gate dielectrics
Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Boher, P.
;
Defranoux, C.
;
Bender, Hugo
Journal
Abstract
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2186
since deposited on 2021-10-15
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Acq. date: 2025-10-25
Citations
Metrics
Views
2186
since deposited on 2021-10-15
424
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations