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Conference contributions
Low-power DRAM-compatible replacement gate high-k/metal gate stacks
Publication:
Low-power DRAM-compatible replacement gate high-k/metal gate stacks
Date
2012
Proceedings Paper
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24919.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ritzenthaler, Romain
;
Schram, Tom
;
Bury, Erik
;
Mitard, Jerome
;
Ragnarsson, Lars-Ake
;
Groeseneken, Guido
;
Horiguchi, Naoto
;
Thean, Aaron
;
Spessot, Alessio
;
Caillat, Christian
;
Srividya, Vidya
;
Fazan, Pierre
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1934
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1934
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations