Publication:

Low-power DRAM-compatible replacement gate high-k/metal gate stacks

Date

2012
Proceedings Paper
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Author(s)

Ritzenthaler, Romain  
;
Schram, Tom  
;
Bury, Erik  
;
Mitard, Jerome  
;
Ragnarsson, Lars-Ake  
;
Groeseneken, Guido  
;
Horiguchi, Naoto  
;
Thean, Aaron  
;
Spessot, Alessio  
;
Caillat, Christian
;
Srividya, Vidya
;
Fazan, Pierre  

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