Publication:

Low-power DRAM-compatible replacement gate high-k/metal gate stacks

Date

2012

Proceedings Paper

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Files

24919.pdf 652.81 KB

Author(s)

Ritzenthaler, Romain

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;

;

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Ragnarsson, Lars-Ake

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Groeseneken, Guido

;

Horiguchi, Naoto

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;

Spessot, Alessio

;

Caillat, Christian

;

Srividya, Vidya

;

Statistics

1944 since deposited on 2021-10-20

Acq. date: 2026-10-11