Publication:

Pull-in voltage analysis of fixed-fixed beams

Date

2001
Proceedings Paper
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dc.contributor.authorPamidighantam, Sayanu
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-14T17:33:33Z
dc.date.available2021-10-14T17:33:33Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5561
dc.source.beginpage269
dc.source.conferenceProceedings 12th Micromechanics Europe Workshop - MME
dc.source.conferencedate16/09/2001
dc.source.conferencelocationCork Ireland
dc.source.endpage272
dc.title

Pull-in voltage analysis of fixed-fixed beams

dc.typeProceedings paper
dspace.entity.typePublication
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