Publication:
Cryogenic etching reduces plasma-induced damage of ultralow-k dielectrics
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1964 since deposited on 2021-10-22
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Acq. date: 2025-10-25
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Views
1964 since deposited on 2021-10-22
445item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations