Publication:

Crystalline properties and strain relaxation mechanism of CVD grown GeSn

Date

2012
Meeting abstract
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dc.contributor.authorGencarelli, Federica
dc.contributor.authorVincent, Benjamin
dc.contributor.authorKumar, Arul
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorVantomme, Andre
dc.contributor.authorFranquet, Alexis
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-20T11:10:03Z
dc.date.available2021-10-20T11:10:03Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20714
dc.source.beginpage3213
dc.source.conferenceECS Fall Meeting Symposium: SiGe, Ge, and Related Compounds: Materials, Processing, and Devices
dc.source.conferencedate7/10/2012
dc.source.conferencelocationHonolulu, HI USA
dc.title

Crystalline properties and strain relaxation mechanism of CVD grown GeSn

dc.typeMeeting abstract
dspace.entity.typePublication
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