Comparative study of stress inducing layers to produce kerfless thin wafers by the slim-cut technique

Publication:

2013

Proceedings Paper

Author(s)

Serra, Joo Manuel

;

Bellanger, Pierre

;

Lobato, Killian

;

Martini, Roberto

;

;

1865 since deposited on 2021-10-21

Acq. date: 2026-08-29