Publication:
Spectroscopic techniques for MEMS inspection
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-16T15:38:52Z | |
| dc.date.available | 2021-10-16T15:38:52Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12004 | |
| dc.source.beginpage | 459 | |
| dc.source.book | Optical Inspection of Microsystems | |
| dc.source.endpage | 481 | |
| dc.title | Spectroscopic techniques for MEMS inspection | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |