Publication:

Low temperature zero-level hermetic packaging for MEMS based on solder and polymer bonding

Date

2003
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Author(s)

De Moor, Piet  
;
Baert, Kris
;
Du Bois, Bert  
;
Jamieson, Geraldine  
;
Jourdain, Anne  
;
Tilmans, Harrie  
;
Van De Peer, Myriam  
;
Witvrouw, Ann
;
Van Hoof, Chris  

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