Publication:

Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorDortu, Fabian
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorRosseel, Erik
dc.contributor.authorNguyen, Duy
dc.contributor.authorShaughnessy, Derrick
dc.contributor.authorSalnick, Alex
dc.contributor.authorNicolaides, Lena
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRosseel, Erik
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned2021-10-17T21:25:24Z
dc.date.available2021-10-17T21:25:24Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15015
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
dc.title

Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions