Publication:

Laser-annealed junctions with advanced CMOS gate stacks for 32nm node: perspectives on device performance and manufacturability

Date

2008
Proceedings Paper
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Author(s)

Ortolland, Claude
;
Noda, Taiji
;
Chiarella, Thomas
;
Kubicek, Stefan
;
Kerner, Christoph  
;
Vandervorst, Wilfried  
;
Opdebeeck, Ann  
;
Vrancken, Christa  
;
Horiguchi, Naoto  
;
de Potter de ten Broeck, Muriel  
;
Aoulaiche, Marc
;
Rosseel, Erik  
;
Felch, S.B.
;
Absil, Philippe  
;
Schreutelkamp, Rob
;
Biesemans, Serge  
;
Hoffmann, Thomas Y.

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