Publication:

Laser-annealed junctions with advanced CMOS gate stacks for 32nm node: perspectives on device performance and manufacturability

Date

2008

Proceedings Paper

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16049.pdf 413.24 KB

Author(s)

Ortolland, Claude

;

;

Chiarella, Thomas

;

Kubicek, Stefan

;

Kerner, Christoph

;

Vandervorst, Wilfried

;

;

Vrancken, Christa

;

Horiguchi, Naoto

;

de Potter de ten Broeck, Muriel

;

Aoulaiche, Marc

;

;

;

Absil, Philippe

;

Schreutelkamp, Rob

;

Biesemans, Serge

;

Hoffmann, Thomas Y.

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Acq. date: 2026-05-24