Publication:
Analyses of post metal etch cleaning in downstream H2O-based plasma followed by a wet chemistry
Date
| dc.contributor.author | Li, H. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Boullart, Werner | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Froyen, L. | |
| dc.contributor.imecauthor | Boullart, Werner | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-14T11:29:35Z | |
| dc.date.available | 2021-10-14T11:29:35Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3617 | |
| dc.source.beginpage | 3843 | |
| dc.source.endpage | 3851 | |
| dc.source.issue | 10 | |
| dc.source.journal | J. Electrochem. Soc. | |
| dc.source.volume | 146 | |
| dc.title | Analyses of post metal etch cleaning in downstream H2O-based plasma followed by a wet chemistry | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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