Publication:

Guest Editorial Special Section on the 2024 SEMI Advanced Semiconductor Manufacturing Conference

Date

2025
Editorial Material
https://doi.org/10.1109/tsm.2025.3594797
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department7ded5759-f876-45bf-a35b-33c35f20fb78
cris.virtualsource.orcid7ded5759-f876-45bf-a35b-33c35f20fb78
dc.contributor.authorBickford, Jeanne Paulette
dc.contributor.authorLe Cunff, Delphine
dc.contributor.authorBuengener, Ralf
dc.contributor.authorRadloff, Stefan
dc.contributor.authorWerbaneth, Paul
dc.date.accessioned2026-06-08T08:04:11Z
dc.date.available2026-06-08T08:04:11Z
dc.date.createdwos2025-09-16
dc.date.issued2025
dc.identifier.doi10.1109/tsm.2025.3594797
dc.identifier.issn0894-6507
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59601
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage372
dc.source.endpage374
dc.source.issue3
dc.source.journalIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
dc.source.numberofpages3
dc.source.volume38
dc.title

Guest Editorial Special Section on the 2024 SEMI Advanced Semiconductor Manufacturing Conference

dc.typeEditorial material
dspace.entity.typePublication
imec.internal.crawledAt2026-04-07
imec.internal.sourcecrawler
imec.internal.wosCreatedAt2026-04-07
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