Process characterization of thin wafer debonding with thermoplastic materials

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Author(s)

Phommahaxay, Alain

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Verbinnen, Greet

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Gabriel, Markus

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Guerrero, Alice

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McCutcheon, Jeremy

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Puligadda, Rama

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Van den Eede, Axel

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Metrics

1985 since deposited on 2021-10-20

Acq. date: 2025-10-27