Publication:
A Pathway for the Integration of Novel Ferroelectric Thin Films on Non-Planar Photonic Integrated Circuits
| dc.contributor.author | Lievens, Enes | |
| dc.contributor.author | De Geest, Kobe | |
| dc.contributor.author | Picavet, Ewout | |
| dc.contributor.author | Van Landschoot, Liesbet | |
| dc.contributor.author | Vrielinck, Henk | |
| dc.contributor.author | Feutmba, Gilles Freddy | |
| dc.contributor.author | Rijckaert, Hannes | |
| dc.contributor.author | De Buysser, Klaartje | |
| dc.contributor.author | Van Thourhout, Dries | |
| dc.contributor.author | Bienstman, Peter | |
| dc.contributor.author | Beeckman, Jeroen | |
| dc.contributor.imecauthor | Lievens, Enes | |
| dc.contributor.imecauthor | De Geest, Kobe | |
| dc.contributor.imecauthor | Van Landschoot, Liesbet | |
| dc.contributor.imecauthor | Feutmba, Gilles Freddy | |
| dc.contributor.imecauthor | Van Thourhout, Dries | |
| dc.contributor.imecauthor | Bienstman, Peter | |
| dc.contributor.orcidimec | Van Thourhout, Dries::0000-0003-0111-431X | |
| dc.contributor.orcidimec | Bienstman, Peter::0000-0001-6259-464X | |
| dc.date.accessioned | 2025-04-03T04:35:16Z | |
| dc.date.available | 2025-04-03T04:35:16Z | |
| dc.date.issued | 2025-MAR 13 | |
| dc.description.wosFundingText | E.L. acknowledges financial support from the Special Research Fund-UGent (BOF20/GOA/027). K.D.G. acknowledges support from the Horizon Europe Project VISSION (Grant ID: 101070622). H.R. acknowledges support and funding as a postdoctoral fellow in the fundamental research of the Research Foundation-Flanders (FWO) under grant number 1280025N. | |
| dc.identifier.doi | 10.3390/mi16030334 | |
| dc.identifier.pmid | MEDLINE:40141945 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45492 | |
| dc.publisher | MDPI | |
| dc.source.issue | 3 | |
| dc.source.journal | MICROMACHINES | |
| dc.source.numberofpages | 11 | |
| dc.source.volume | 16 | |
| dc.subject.keywords | ELECTRON-BEAM LITHOGRAPHY | |
| dc.subject.keywords | HYDROGEN SILSESQUIOXANE | |
| dc.subject.keywords | PLANARIZATION | |
| dc.title | A Pathway for the Integration of Novel Ferroelectric Thin Films on Non-Planar Photonic Integrated Circuits | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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