Publication:
Stress measurements using ultraviolet micro-Raman spectroscopy
Date
| dc.contributor.author | Dombrowski, Kai | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Dietrich, B. | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-10-06T11:05:27Z | |
| dc.date.available | 2021-10-06T11:05:27Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3425 | |
| dc.source.beginpage | 2450 | |
| dc.source.endpage | 2451 | |
| dc.source.issue | 16 | |
| dc.source.journal | Appl. Phys. Lett. | |
| dc.source.volume | 75 | |
| dc.title | Stress measurements using ultraviolet micro-Raman spectroscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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