Publication:
Evaluation of stray light and quantitative analysis of its impact on lithography
Date
| dc.contributor.author | Kim, Young-Chang | |
| dc.contributor.author | De Bisschop, Peter | |
| dc.contributor.author | Vandenberghe, Geert | |
| dc.contributor.imecauthor | De Bisschop, Peter | |
| dc.contributor.imecauthor | Vandenberghe, Geert | |
| dc.date.accessioned | 2021-10-16T02:32:15Z | |
| dc.date.available | 2021-10-16T02:32:15Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10697 | |
| dc.source.beginpage | 43002 | |
| dc.source.issue | 4 | |
| dc.source.journal | Journal of Microlithography, Microfabrication, and Microsystems | |
| dc.source.volume | 4 | |
| dc.title | Evaluation of stray light and quantitative analysis of its impact on lithography | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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