Publication:
Statistical analysis of shallow P-N junction leakage increase using XTEM results probabilities
Date
| dc.contributor.author | Czerwinski, A. | |
| dc.contributor.author | Katcki, J. | |
| dc.contributor.author | Poyai, Amporn | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Ratajczak, J. | |
| dc.contributor.author | Gaubas, Eugenijus | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T16:44:13Z | |
| dc.date.available | 2021-10-14T16:44:13Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5174 | |
| dc.source.beginpage | 105 | |
| dc.source.endpage | 107 | |
| dc.source.issue | 1_3 | |
| dc.source.journal | Materials Science in Semiconductor Processing | |
| dc.source.volume | 4 | |
| dc.title | Statistical analysis of shallow P-N junction leakage increase using XTEM results probabilities | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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