Publication:
Test of vector effect emulation of the AIMSTM45-193i
Date
| dc.contributor.author | De Bisschop, Peter | |
| dc.contributor.author | Philipsen, Vicky | |
| dc.contributor.author | Birkner, Robert | |
| dc.contributor.author | Richter, Rigo | |
| dc.contributor.author | Scheruebl, Thomas | |
| dc.contributor.imecauthor | De Bisschop, Peter | |
| dc.contributor.imecauthor | Philipsen, Vicky | |
| dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
| dc.date.accessioned | 2021-10-16T15:29:21Z | |
| dc.date.available | 2021-10-16T15:29:21Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11944 | |
| dc.source.conference | 4th International Immersion Lithography Symposium | |
| dc.source.conferencedate | 8/10/2007 | |
| dc.source.conferencelocation | Keystone, CO USA | |
| dc.title | Test of vector effect emulation of the AIMSTM45-193i | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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