Publication:
Relibility aspects of MEMS
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-14T21:25:44Z | |
| dc.date.available | 2021-10-14T21:25:44Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6229 | |
| dc.source.conference | The GOOD-DIE International Workshop CAST - Challenges for Advanced Semiconductor-die Technologies | |
| dc.source.conferencedate | 22/05/2002 | |
| dc.source.conferencelocation | Brugge Belgium | |
| dc.title | Relibility aspects of MEMS | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |