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Relibility aspects of MEMS

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dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-14T21:25:44Z
dc.date.available2021-10-14T21:25:44Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6229
dc.source.conferenceThe GOOD-DIE International Workshop CAST - Challenges for Advanced Semiconductor-die Technologies
dc.source.conferencedate22/05/2002
dc.source.conferencelocationBrugge Belgium
dc.title

Relibility aspects of MEMS

dc.typeProceedings paper
dspace.entity.typePublication
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