Publication:
Low dielectric constant materials for advanced microelectronics
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-16T15:01:55Z | |
| dc.date.available | 2021-10-16T15:01:55Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11682 | |
| dc.source.beginpage | 10 | |
| dc.source.conference | International Conference on Micro- and Nanoelectronics | |
| dc.source.conferencedate | 1/10/2007 | |
| dc.source.conferencelocation | Moscow Russia | |
| dc.source.endpage | 10 | |
| dc.title | Low dielectric constant materials for advanced microelectronics | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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