Publication:

TEM studies of processed Si device materials

Date

1997
Proceedings Paper
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dc.contributor.authorVanhellemont, Jan
dc.contributor.authorBender, Hugo
dc.contributor.authorVan Landuyt, J.
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-09-30T09:58:03Z
dc.date.available2021-09-30T09:58:03Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2269
dc.source.beginpage393
dc.source.conferenceMicroscopy of Semiconducting Materials 1997
dc.source.conferencedate7/04/1997
dc.source.conferencelocationOxford UK
dc.source.endpage402
dc.title

TEM studies of processed Si device materials

dc.typeProceedings paper
dspace.entity.typePublication
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